practices for waste management associated with the grinding, lapping and polishing of gallium arsenide in the wafer thinning process. Bode Growth Wering Backthinning Didng Packaged IC ackside processing of gallium arsenide and other Ill-V semiconductors dictates that fabricated wafers are thinned from 62511m to
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Read more...27-06-2010· Total arsenic content was determined using inductively coupled plasma-mass spectrometry (ICP-MS) and found to be in excess of the EU discharge limit of 0.5mgL-1 for all three processes, with arsenic content highest in wafer polishing waste slurry (>2,000mgL-1), followed by wafer lapping (10 – 100 mgL-1) with wafer grinding having the lowest arsenic content (<10mgL-1).To better understand …
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